|Nanostructures and Devices||Hours: 3 0 3|
MEMS, NEMS and their processing methods, materials used for the production of MEMS, NEMS and other nanodevices. Materials selection issues for such devices, process design rules and process yield issues, integration of various processes into single assembly. Various patterning techniques such as photolithography, embossing, printing, laser micromachining, thin film deposition etc. Interrelationships between material properties and processing, device structure, and the electrical, mechanical, optical, chemical or biological behavior of devices.
|Pre-requisites: None||Co-requisites: None|
Hours: XYZ where X = Lecture, Y = Lab, Z = Credit
All hours are per week.
3 Lab hours constitute 1 credit hour
1 credit hour implies 1 lecture of 50mins per academic week. 16 weeks in total.
Pre-Requisite courses are courses required to be completed before this course may be taken
Co-Requisite courses are courses required to be taken along with this course