Micro and Nano Fabrication

Micro and Nano FabricationHours: 3 0 3

Introduction to micro and Nano fabrication, Basic Micro fabrication Techniques (lithography, etching), Thin film deposition (Chemical vapor deposition (CVD), sputtering, Physical vapor deposition (PVD), Surface modification, Micromachining (drilling, milling, electric discharge machining, turning), Micro fabrication using 3D Printing and Photo catalytic reaction, Micro joining (solid state bonding, soldering and brazing, fusion micro-welding, adhesives), Assembly and automation, Applications of micro fabrication, Introduction to Nanofabrication and Materials, Nanofabrication Techniques (E-Beam Nanofabrication, Scanning Probe Techniques, rapid prototyping, X-ray lithography, nano grooving), Nano joining (Bonding using nanoparticles, Focused ion beam machining, growth patterning, welding using electron beam, Indirect joining by SEM and TEM, Ion beam, resistance, ultrasonic, laser), Self-Assembly and Template Manufacturing, Applications of nanofabrication and materials.

Pre-requisites: NoneCo-requisites: None

Hours: XYZ where X = Lecture, Y = Lab, Z = Credit
All hours are per week.
3 Lab hours constitute 1 credit hour
1 credit hour implies 1 lecture of 50mins per academic week. 16 weeks in total.
Pre-Requisite courses are courses required to be completed before this course may be taken
Co-Requisite courses are courses required to be taken along with this course

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