MEMS Design and Micromachining

MEMS Design and Micromachining
Hours: 3 0 3

MEMS devices; MEMS operating principle and applications; accelerometers/combdrive; RF switch; micromirror design and scaling issues; system level design using SPICE; 2D layout design; 3D modeling with process emulation; physical level simulation and analysis using ANSYS; micromachining/microfabrication technologies; micromachining techniques; CMOS compatible bulk micromachining; surface micromachining; a surface micromachining technology PolyMUMPs will be studied with description of technology file development in L-Edit layout tool.

Pre-requisites: noneCo-requisites: none

Hours: XYZ where X = Lecture, Y = Lab, Z = Credit
All hours are per week.
3 Lab hours constitute 1 credit hour
1 credit hour implies 1 lecture of 50mins per academic week. 16 weeks in total.
Pre-Requisite courses are courses required to be completed before this course may be taken
Co-Requisite courses are courses required to be taken along with this course